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光热敏微晶玻璃的制备及其特性研究

Studies of Preparation and Characteristics in Photothermo sensitive Microcrystal Glasses

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【作者】 李磊席淑珍

【Author】 LI Lei,XI Shu Zhen (State Key Laboratory of Applied Optics,Changchun Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Changchun 130022)

【机构】 中国科学院长春光学精密机械研究所应用光学国家重点实验室

【摘要】 研究了SiO2-R2O-Al2O3-ZnO-B2O3(R=Li、Na、K)系统的玻璃组成及光敏、热敏组分对敏化、成核及受控结晶的影响。在1320~1420℃熔化制备了原始透明玻璃。用λ=2537光源进行光刻,经400~560℃及2~5h热处理工艺,获得了性能良好的光热敏微晶玻璃。测定了玻璃中微晶相的密度变化,证明了体积效应。由x射线粉末衍射分析鉴定其微晶相为Li2O·SiO2,晶粒尺寸为23.8nm。

【Abstract】 Glasses in the SiO 2 R 2O Al 2O 3 ZnO B 2O 3(R=Li、Na、K)system were prepared at 1320—1420℃.After UV photolithograph,the samples were treated at 400 ̄560℃ for 2 ̄5h.A UV lamp is used as light resource for photolithograph,the most intensive wavelength is at 2537.The effects of glass composition and photothermo sensitive components on the microcrystal property were studied.The volume effect was proved by measuring the density variation of the microcrystals.The microcrystal phase was characterized by x ray powder diffraction as Li 2O·SiO 2 and grain size as 23 8nm.

【基金】 国家自然科学基金
  • 【文献出处】 光学精密工程 ,OPTICS AND PRECISION ENGINEERING , 编辑部邮箱 ,1998年02期
  • 【分类号】TQ171.733
  • 【被引频次】20
  • 【下载频次】185
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