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氮化硅陶瓷的微波烧结

Microwave Sintering of α/β-Si 3N 4

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【作者】 徐耕夫庄汉锐李文兰邬凤英

【Author】 Xu Gengfu Zhuang Hanrui Li Wenlan Wu Fengying (Shanghai Institute of Ceramics, Chinese Academy of Sciences)

【机构】 中国科学院上海硅酸盐研究所

【摘要】 利用TE103单模腔微波烧结系统对添加6%(Y2O3+Al2O3)的α、β-Si3N4粉的微波加热特征进行了研究。通过选择合理的保温材料和烧结工艺,获得了较高密度、结构均匀的氮化硅烧结体。实验发现,对于粉末为α-Si3N4的试样,在相变发生的温度范围内,相变的发生比致密化进程更早,而且发生在一个相对更低的温度,研究结果也表明,在微波烧结中相变促进致密化进程。在较短的时间内获得较高的密度和较好的力学性能,氮化硅的微波烧结显示了加强的烧结行为,这种加强的烧结行为来自快速加热中温度梯度产生的瞬间应力。

【Abstract】 Dense silicon nitride from α and β-Si 3N 4 powders with 6wt%(Y 2O 3+Al 2O 3) additives were fabricated in a TE 103 single mode cavity microwave sintering system operating at 2 45 GHz. Proper packing powders and sintering measures were used. The sintering behavior from both powders was investigated with special interests in the evolution of α to β-Si 3N 4 phase transformation, densification and microstructure development. Densities of about 96.7% T.D.and 95% T.D.were separately achieved by microwave sintering of α and β-Si 3N 4 powders, and it was also observed that α to β conversion was more rapid than densification process in microwave heating of α-Si 3N 4. It is evident that microwave sintering of Si 3N 4 showed enhanced sintering behavior, and transient stress caused by temperature gradient is believed to be responsible for enhanced sintering. Mechanical properties of sintered specimen were also reported.

【关键词】 氮化硅陶瓷微波烧结相变
【Key words】 Si 3N 4ceramicsmicrowave sinteringphase transformation
  • 【文献出处】 硅酸盐通报 ,BULLETIN OF THECHINESE CERAMIC SOCIETY , 编辑部邮箱 ,1998年04期
  • 【分类号】TQ174.758.12
  • 【被引频次】14
  • 【下载频次】364
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