【摘要】 简要讨论了微机械系统的三种组装技术，即玻璃吸附针尖、微夹钳和具有人手功能的微机械手。把第一、二种技术有机结合是满足目前微机械系统组装需求的有效捷径。更多还原

【Abstract】 icromechanical systems must be assembled where monolithic integration is not feasible because of incompatible processes, complex geometries, or different materials involved. This paper comments on three assembly techniques developed for micromechanics, i.e., assembly techniques using suction glass needle, microclamp, and multipurpose micromanipulator modeling man hand. Based on the analysis of these assembly techniques, the authors point out that assembly technique combining suction glass needle and microclamp can meet the requirements of current micromechanical system assembly, and it is a costeffective way. 更多还原