【摘要】 在分析压电行波马达工作原理的基础上，采用微机械加工工艺分别研制成定子和转子，并通过微组装得到了完整的微机械压电马达。马达定子、转子的尺寸均为２ｍｍ。初步实验表明，在小于１０伏交流信号激励下，马达旋转转速可达到约５０ｒｐｍ。更多还原

【Abstract】 おy analyzing the operation principle of the travelingwave piezoelectric motors, micro stators and rotators had been fabricated by the traditional microelectronic technology and micromachining technology, respectively. Meantime, the micromotors had been obtained by microassembly. The diameter of the microrotator and stator is 2mm. The preliminary experiments show that the rotation speed is about 50rpm under 10V alternative driving signal.更多还原