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高精度光学表面的OFHC铜反射镜抛光技术
Polishing Technology for High Precision Optical Surface of OFHC Copper Mirror
【摘要】 已研制出用于红外(3.8μm)波段光辐射的特殊光学元件样品——高精度光学表面质量的无氧高导(OFHC)铜平面反射镜。本文描述了此种铜镜基底的抛光技术。讨论了材料的选择、基底成形精磨及抛光工艺研究,给出了最终光学表面的测量结果。
【Abstract】 A special optical element sample Oxygen Free High Carrier(OFHC) copper mirror with high precision optical surface for IR (3.8μm) laser has been developed.The polishing technologies for this copper mirror are described.The selection of the material,shaping and fine grinding of the substrate,and the polishing technologies are discussed in the paper.The final measuring results of the optical surface are given.
- 【文献出处】 光电工程 ,OPTO-ELECTRONIC ENGINEERING , 编辑部邮箱 ,1998年01期
- 【分类号】TG356.28,TG356.28
- 【被引频次】4
- 【下载频次】135