【摘要】 透明导电膜在电气及光学领域的应用日益广泛。近年来以掺杂Ｓｎ的Ｉｎ２Ｏ３（简称ＩＴＯ）开发和应用受到重视。用ＩＳＯ靶通过溅射法制备ＩＴＯ透明导电膜。由金属铟制取氧化铟粉末，后与氧化锡混合、压制烧结制出相对密度达９５％的ＩＴＯ靶材。更多还原

【Abstract】 Transparent conductive film is widely used in the electrical and optical engineering fields Recently, In 2O 3 doped with Sn(ITO) become more and more popular ITO is prepared with ISO target and sputtering technology Target material of ITO with a density of 95% can be acquire by means of mixing the In 2O 3 powder made from In with SO 2, pressing and firing (12 refs )更多还原