【摘要】 采用RF磁控溅射方法制备了一系列AlN／DyFeCo／glass多层磁光薄膜。扫描电镜分析表明，随着溅射DyFeCo薄膜时氩气压的增大，AlN／DyFeCo界面的粗糙程度增大。进一步的研究表明，界面粗糙程度的改变对磁光多层膜的磁光特性影响很大，界面越粗糙，矫顽力从越大，反射率R越低，而克尔角θk首先随表面粗糙程度的增大而增大，到达一极大值然后再随表面粗糙程度的增大而减小。更多还原

【Abstract】 A series of DyFeCo films have been deposited onto glass using RF magnetron sputtering and coated with AlN films. Increases in the inter facial roughness have been found with increasing argon pressure from 0. 2 to 1. 0Pa by scanning electron microscopy (SEM). Furthermore. a strong relation has been found between the interfacial roughness and the magneto-optical characristicis. Larger interfacial roughness gives rise to larger coercivity Hc and smaller reflectivity R. Meanwhile,the Kerr rotation angle θk increases with increasing interfacial roughness until it reaches a maximum and then decreases.更多还原