【摘要】 本文论述用电容传感器检测介质材料厚度,对测量灵敏度和检测厚度精度进行分析,指出减小介质介电常数变化影响的方法。本文提出的频率变换型测厚方法,所需设备结构简单、处理方法先进、精度高,还具有自校和自补偿功能。更多还原

【Abstract】 This paper discusses a thickness on medium test using capacitance-based sensor. It analyses the sensitivity and accuracy of measure, and point out the method for reducing influence in change of dielectric constant. This paper introduces a method on thickness test using frequency transfer, It has simple in structure, advanced in handling method and high in accuracy, It has function in self-calibration and self-compensation yet.更多还原