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结构陶瓷在压力传感器中的应用

Structure Ceramics Applied In The Pressure Transducer

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【作者】 李士忠石汝军翟鹏郭益平李岩

【Author】 Li Shizhong; Shi Rujun; Zhai Peng; Guo Yiping; Li Yan(Shandong Insititute of Ceramics Research & Design. Zibo 255086)

【机构】 山东省硅酸盐研究设计院!淄博255086

【摘要】 结构陶瓷作为零力学滞后、低介电绝缘材料,在压力传感器中应用可以降低压力传感器的蠕变现象.提高其反应速度。由于陶瓷烧结体耐高温、耐腐蚀,可以在其上制备微米级导电和绝缘薄膜,使压力传感器的精度和抗冲击、抗过压能力大大提高。其相关技术为其它传感器的小型化、集成化、多功能化奠定了基础。

【Abstract】 Structure ceramics being a low mechanical hysteresis and dielectric insulating material, a pressure transducer cut down creep, and increased reaction speed. Ceramics sinter-ing was heat-resisting and corrosion-resistance, on which we could build a lay of insulating film (the thickness is a several micron). The precision of a pressure transducer was improved,the resistance of pounding and over pressure was increased. Transducers related to this tech-nique lying a foundation for miniature, grand compendium, multi-function.

  • 【分类号】TQ174
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