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结构陶瓷在压力传感器中的应用
Structure Ceramics Applied In The Pressure Transducer
【摘要】 结构陶瓷作为零力学滞后、低介电绝缘材料,在压力传感器中应用可以降低压力传感器的蠕变现象.提高其反应速度。由于陶瓷烧结体耐高温、耐腐蚀,可以在其上制备微米级导电和绝缘薄膜,使压力传感器的精度和抗冲击、抗过压能力大大提高。其相关技术为其它传感器的小型化、集成化、多功能化奠定了基础。
【Abstract】 Structure ceramics being a low mechanical hysteresis and dielectric insulating material, a pressure transducer cut down creep, and increased reaction speed. Ceramics sinter-ing was heat-resisting and corrosion-resistance, on which we could build a lay of insulating film (the thickness is a several micron). The precision of a pressure transducer was improved,the resistance of pounding and over pressure was increased. Transducers related to this tech-nique lying a foundation for miniature, grand compendium, multi-function.
【关键词】 结构陶瓷;
压力传感器;
零力学滞后;
【Key words】 Structure Ceramics The pressure transducer Zero mechanical hysteresis;
【Key words】 Structure Ceramics The pressure transducer Zero mechanical hysteresis;
- 【文献出处】 山东陶瓷 ,SHANDONG CERAMICS , 编辑部邮箱 ,1998年04期
- 【分类号】TQ174
- 【下载频次】102