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Fe₂O₃-SnO₂双层薄膜对氨气敏感特性及其机理研究

Study of Sensing Properties and Sensing Mechanism of Fe 2O 3 SnO 2 Double Layer Thin Films to Ammonia

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【Author】 Dai Guorui, He Xiuli, Wang Zongchang, Nan Jin(Department of Electronic Engineering, Jilin University, Changchun\ 130023)

【机构】吉林大学电子工程系；

【摘要】本文报道了以Ｆｅ（ＣＯ）５和ＳｎＣｌ４为源，采用ＰＥＣＶＤ技术淀积Ｆｅ２Ｏ３－ＳｎＯ２双层薄膜，将该薄膜淀积在陶瓷管上，对氨气的敏感特性进行了测量，并讨论了敏感机理．更多还原

【Abstract】 Abstract Fe 2O 3 SnO 2 double layer films have been prepared on a porcelain tube by using PECVD technique with Fe(CO) 5 and SnCl 4 as precursors. The sensing characteristics of the thin films to ammonia are measured and its sensing mechanism is discussed.更多还原