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分子束外延系统中生长Si/SiO₂超晶格及其发光

Growth of Si/SiO 2 Superlattices in MBE System and Its Luminescence

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【Author】 Lin Feng, Sheng Chi, Gong Dawei, Liu Xiaohan(State Key Laboratory of Surface Physics,Fudan University, Shanghai 200433)

【机构】复旦大学物理系和应用表面物理国家重点实验室；

【摘要】在硅分子束外延（ＭＢＥ）系统中，利用Ｓｉ和Ｏ２共淀积的方法生长出化学配比理想的ＳｉＯ２，在此基础上生长了Ｓｉ／ＳｉＯ２超晶格并观察到其光致发光（ＰＬ）谱更多还原

【Abstract】 Abstract By using the technique of Si and O 2 codeposition,SiO 2 with perfect stochiometry has been grown in a molecular beam epitaxy system. We have designed a structure of Si/SiO 2 superlattices and observed its photoluminescence under the excitation of Ar + laser.更多还原