【摘要】 采用真空蒸发技术，以醋酸锌和氯化铝作为蒸发物质，在加热的玻璃衬底上制备出氧化锌和铝掺杂的氧化锌透明导电薄膜．研究了氢气、空气和真空退火处理对制备薄膜的结构及电学性能的影响更多还原

【Abstract】 Abstract Un doped and aluminium doped zinc oxide films were prepared by evaporation of zinc acetate and aluminium chloride onto heated glass substrate. The affect of heat treatment in air, hydrogen gas and vacuum on the structure and electrical properties of the films are studied.Heat treatment in hydrogen gas and vacuum significantly decreases the resistivity of these ZnO films by more than five or six orders of magnitude.This behavior can be understood in terms of a grain boundary trapping model.更多还原