【摘要】 采用激光束反射偏转法测量了用溶胶－凝胶法在Ｓｉ（１１１）基片上制备的ＴｉＯ２－ＳｉＯ２复合薄膜的曲率半径。由此计算出薄膜的热应力、应力和本征应力。研究了工艺过程与薄膜应力的关系，其应力随热处理温度的增加而由张应力转变为压应力；当热处理温度较低时，随膜厚的增加，其应力增大，而最终导致膜的开裂。薄膜的最大不开裂厚度随热处理温度和ＴｉＯ２含量的增加而增加。更多还原

【Abstract】 The stress in the TiO2SiO2 solgel coatings on Si substrate was investigated by a laser reflectance technique.The relation between technological process and thin film stress(including stress σf,intrinsic stress σi and stress σth) was studied.The tensile stress was decreased and transformed into compressive stress as the annealing temperature increase. At lower temperature,the stress increased as the thickness increased and consquently caused cracking of the film.A critical thickness of the film was increased as the TiO2 content and annealing temperature increase.更多还原