【摘要】 本文介绍了同轴圆柱形磁控溅射源的换热计算方法，根据传热学原理对其换热情况做了分析，并对如何选择冷却水及有关靶结构的参数做了探讨。更多还原

【Abstract】 The calculation method of heat exchange for coaxial cylinder magnetron sputtering source is given in this article. On the principle of heat transfer, the state of heat exchange has been analized for it, and the option of water cooling parameters concerning with the target structure has been discussed.更多还原