【摘要】 在很多情况下，扫描隧道显微镜（STM）图像的几何形貌方面的误差主要是由压电陶瓷的漂移、X扫描器和Y扫描器的压电系数的不一致性和压电陶瓷扫描时的非正交性引起的。本文建立了一种物理数学模型来校正这些误差，取得了满意的结果。即使在漂移的状态下，也可以利用已知结构的表面对STM仪器进行校准（例如，高定向石墨表面）。用校准以后的STM仪器，可以获得样品表面的真实图像，并使对样品进行原子级的测量成为可能。更多还原

【Abstract】 In quite a few cases,the image distortion of a scanning tunneling microscope(STM)is essentially caused by thermal drift,the different piezoelectric constants between the X and Y scanners and the nonorthogonal scanning. A physical and mathematical model is proposed to correct such distortions,with satisfactory results. Using this model,one can perform the STM calibration with a known surface structure (for example,the highly oriented pyro1ytic graphite surface) even in the presence of a drift. Using such a calibrated STM and the described model,it is possible to obtain the real STM driage and make measurements for unknown surfaces on the atomic scale.更多还原