【摘要】 基于微波电子回旋共振（ECR）等离子体中的物理和化学性质变化会引起微波传输线阻抗的变化，采用微波三探针研究了ECR等离子体的微波阻抗随装置运行参数的变化情况，并通过一个简单的放电等效电路将阻抗的变化和等离子体性质的变化联系起来。实验结果表明，通过对ECR等离子体进行阻抗特性分析，可以在不对其产生干扰的情况下了解其性质的变化。阻抗特性分析为ECR等离子体的机理研究提供了一种新的诊断途径，有利于ECR等离子体工艺的推广和应用。更多还原

【Abstract】 Based on that the changes of physical and chemical properties of electron cyclotron resonance (ECR) plasma can cause the changes of plasma impedance in microwave transmission line, a microwave three-probe system has been used to study the changes of plasma impedance with operational parameters of the apparatus. Based on a simple analog model of electrical discharge,the variation of plasma properties can be related with the changes of the plasma impedance. The results show that the changes of the properties of ECR plasma can be investigated by characterization of the plasma impedance. The characterization of the plasma impedance provides a new diagnostic method for the study of the mechanism of ECR plasma,and is useful to the application of ECR plasma technology.更多还原