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碳污染对钛膜吸氢能力影响的研究
Effect of C Contamination on H2 Uptake of Ti Film
【摘要】 在钼基底上蒸镀钛膜,用乙炔(C2H2)在钛膜表面引入碳污染,用X射线光电子谱和俄歇电子谱研究钛膜表面的碳的化学状态,以及表面的碳污染对钛膜吸氢能力的影响。实验发现,碳在钛表面以两种到三种化学状态存在。碳在钛表面将使钛膜的吸氢能力下降,而且不同化学状态的碳对钛膜吸氢能力的影响也不同。实验结果表明,呈TiC状态的碳是降低钛膜吸氢能力的主要因素,其原因是它使解离吸附位置减少。
【Abstract】 Contamination effects of carbon on hydrogen uptake of Ti film deposited on Mo substrate was investigated by the metheds of surface analysis. On the Ti surface,carbon contamination was intentionally introduced,and three chemical states of carbon were detected, whose presence reduced the hydrogen uptake.The results indicate that TiC is the main factor of reducing the ability of hydrogen absorption due to the decrease of dissociative sites.
【关键词】 钛膜;
碳污染;
X射线光电子谱;
俄歇电子谱;
吸氢量;
【Key words】 Ti film; C contamination; X-ray photoelectron spectroscopy; Auger electron spectroscopy; Hydrogen uptake;
【Key words】 Ti film; C contamination; X-ray photoelectron spectroscopy; Auger electron spectroscopy; Hydrogen uptake;
【基金】 中国工程物理研究院基金
- 【文献出处】 真空科学与技术 , 编辑部邮箱 ,1997年01期
- 【分类号】O613
- 【被引频次】3
- 【下载频次】72