Photoluminescence from C⁺ -implanted SiO₂ films thermally grown on crystalline silicon

【摘要】 <正> Silicon is the most important semiconductor material. In order to realize Si-based optoelectronic integration, the studies of Si-based light-emitting materials attract much attention. Recently, the SiO₂ film grown on crystalline silicon is being studied as a kind of light-emitting materials, because its preparation is fully compatible with the current silicon planar technique and it has been widely used in microelectronic integrated circuits as resistance masks or dielectric films.更多还原