【摘要】 介绍一种适用于半导体烧结炉的控温系统。该系统由单回程调节器、可编程控制器与功率控制模块组成。简单介绍了控制算法,给出实时控制结果。实验证明,控温曲线达到了预期效果,并且超调量极小。更多还原

【Abstract】 A temperature control system which is adapted for sintering furnace of semiconductor is introduced. The system is composed of single loop controller, programmable controller and power control module. The control algorithm is described briefly and the real time control result is given. The experiments show that the control curves have reached the expected result and the quantity of over control is very small.更多还原