【摘要】 研讨了激光加工的物理特点，提出一种激光打孔过程的微机自动化监控方法，解决了金刚石打孔的高速在线三维监控问题，在金刚石上成功地打出了μm级特型孔。更多还原

【Abstract】 Based on the analysis of the physical features of laser manufacturing, a microcom puter based supervision and control technique for laser drilling process was proposed in this paper. It completed the fast and on-line three dimenisions control and successfully drilled the μm diameter hole in diamond.更多还原