【摘要】 提出用标定法测量刚体多维微位移，该方法具有结构简单、性能可靠、集成化程度高、工业上易实现和价格便宜等优点。本文采用一个小功率激光器为光源及一种新型的CMOS图像传感器为光电传感器件，通过相关分析法和数据拟会等图像处理技术，提高了整套系统的精度和分辨率。更多还原

【Abstract】 It is proposed that rigid body multidimension micro-displacement is measured by use of a calibration method, and this method has the advantages of simple construction, reliable performance, high integrated level, easy realization in industry and inexpensive price etc..Taking a small power laser as light source and a new CMOS image sensor as electro-optical sensing device, and by use of some image processing technologies, such as correlation analysis and data fitting etc,, the accuracy and resolution of the whole system have been increased.更多还原