【摘要】 通过醇盐水解制备ＴｉＯ２微粉并用厚膜工艺制备氧敏传感器；用专门造孔技术增加了厚膜敏感体中的孔隙率；用液相掺杂热扩散工艺对多孔敏感膜进行了表面修饰，提高其催化活性，采用温度自补偿方法提高了器件的高温性能更多还原

【Abstract】 Powder TiO 2 was prepared by hydrolytic decomposition of alkoxide and the oxygen sensor made by thick-layer techniture,The porosity of thick layer oxygen sensor was improved by the special pore-making techniture. The heat proliferation of liquid dope was used to decorate surface of porous sensing film and improve catalytie activity. Using temperature auto-equilibrate to improve high temperature properties of sensor.更多还原