【摘要】 本文综合分析了影响电子束曝光机加工精度的各种误差的来源与类型，误差的影响与估算．以及误差的综合与数据处理。更多还原

【Abstract】 In this paper, the sources and types of different errors affecting the fabricating precision of the electron beam exposure machine are analyzed. And the affection evaluation, synthesis and data processing of errors are stated.更多还原