【摘要】 从微观粒子的相互作用和输运出发，探讨靶溅射过程中的基元化学物理步骤，计算了溅射速率和离子能量分布，为深入研究溅射薄膜的生长速率和靶中毒奠定基础。更多还原

【Abstract】 The elementary chemicophysical processes are studied by the micro-particles in-teraction and transportation, and the sputtering rate and energy distribution of theions are also calculated. The results give the basis for further studies of the growingrate of sputtering thin film and the target poisoning.更多还原