【摘要】 弹道电子发射显微术（ＢＥＥＭ）能够对金属／半导体等界面体系进行直接、实时及无损的探测，并且具有纳米级空间分辨率．文章介绍了ＢＥＥＭ的基本原理、关键技术及其应用，并给出了有关实验结果更多还原

【Abstract】 Ballistic electron emission microscopy (BEEM) can be used to investigate the electronic properties of metal/semiconductor interfaces with nanometer resolution. An overview of BEEM is described, with emphasis on its principle, key technical problems and applications. Some experimental results are given.更多还原