【摘要】 在用等离子体增强化学汽相淀积的嵌有纳米晶粒硅薄膜中观测到电致发光．发光谱处在５００—８００ｎｍ之间，它有两个分别位于６３０—６８０ｎｍ和７３０ｎｍ附近的峰，两个峰的强度与薄膜的电导率有密切关系．根据这种材料的结构特性对载流子的传导通道进行了讨论，并且对发光机制进行了初步解释更多还原

【Abstract】 We have observed visible electroluminescence (EL) from silicon nanocrystallites which are embedded in a Si∶H films prepared in a plasma enhanced chemical vapor deposition system. The EL spectra are in the range of 500nm to 850nm with two peaks located at about 630—680nm and 730nm respectively. We found that the intensity of EL peaks is related closely to the conductivity of the deposited films. The carrier conduction path is discussed in terms of the material structural characteristics, and a tentative explanation of the light emission mechanism is proposed.更多还原