【摘要】 分别采用微波等离子体化学汽相沉积法和热丝化学汽相沉积法在氧化铝陶瓷基片上沉积金刚石薄膜．通过谱线拟合，定量比较了不同沉积方法、不同基片上沉积金刚石薄膜的质量，计算了沉积膜的结构完整性及沉积层的应变，其结果与Ｘ射线衍射的结果符合良好更多还原

【Abstract】 Diamond films were alternatively deposited on alumina ceramic wafers by microwave plasma chemical vapor deposition (MPCVD) and hot filament chemical vapor deposition (MPCVD).The qualities of the deposited diamond films deposited on different wafers with different deposited techniques were appraised by the method of fitting the spectra, and the domain size and strain of the films were calculated.The results of calculation were consistence with that derived from the X ray diffraction analyses.更多还原