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氯硅烷的气相色谱分析

Determination of Chlorosilanes by Gas Chromatography

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【作者】 沈怡文曲吉川张洪度

【Author】 Shen Yiwen, Qu Jichuan and Zhang Hongdu (Institute of Metal Research, the Chinese Academy of Sciences, Shenyang, 110015)

【机构】 中国科学院金属研究所

【摘要】 采用涂邻苯二甲酸二乙酯的气相色谱柱对用化学气相沉积法制备SiC纤维的主要原料——氯硅烷直接进样分析,在较短的时间内即可得知每批原料的差异。实验表明,方法操作简便、快速,重复性和精密度较好,重复6次的变异系数均<1%。可用于SiC纤维原料的质量监测。

【Abstract】 Chlorosilanes are the essential raw material of SiC fibre made by “CVD(chemical vapour deposition)” method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support(60 80 mesh), 3m×5mm i.d. stainless steel column; column temp., 60℃; injection temp., 110℃; thermal conductivity detector temp., 140℃ carrier gas H 2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility . The coefficient of variation of the method was less than 1%(n=6).

【关键词】 气相色谱法氯硅烷
【Key words】 gas chromatographychlorosilanes
【基金】 “863”计划资助
  • 【文献出处】 色谱 ,CHINESE JOURNAL OF CHROMATOGRAPHY , 编辑部邮箱 ,1997年03期
  • 【分类号】O658/O62
  • 【被引频次】10
  • 【下载频次】123
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