【摘要】 介绍一种高温氧化薄膜应力的测定技术，它能在一定高温氧化条件下原位测定氧化膜中的生长应力，在某一温度变化范围内原位测定氧化膜中的热应力．这种技术可在普通衍射仪上进行更多还原

【Abstract】 A measuring technique of high temperature oxide thin film stress is introduced. The growth stresses of the oxide thin film can be measured on the condition of the constant high temperature oxidation and the thermal stresses can be measured within the variations of a certain temperature. The measuring technique can be carried out with an ordinary diffractometer.更多还原