【摘要】 对Ｆｅ刻蚀金刚石过程中石墨析出的速率进行了定量的研究。Ｆｅ刻蚀金刚石的过程是：金刚石晶格中的碳原子溶入γＦｅ，在γＦｅ中扩散并在远离金刚石的一侧以石墨态析出。由该机制导出了石墨析出速率的理论公式。石墨析出速率（ＪＧ）与温度、保温时间、Ｆｅ膜厚度及碳在γＦｅ中的扩散系数有关。合理设置上述参数及通过添加元素改变扩散系数的方法，可以控制Ｆｅ与金刚石反应时石墨的析出量更多还原

【Abstract】 Quantitative analysis of the separating rate of graphite was made in the process of iron’s etching diamond. The process is the dissolving of carbon atoms in the diamond lattice into γ iron, diffusing in the γ iron and separating out as graphite far off the side of diamond. From this mechanism, theoretical formula of the separating rate of graphite was deduced. The rate (J G ) is related with temperature, holding time, thickness of iron film and diffusion coefficient of carbon in γ iron. by reasonably setting up the parameters and adding elements to change the diffusion coefficient of carbon, the quantity of graphite would be controlled.更多还原