【摘要】 本文对热丝ＣＶＤ法沉积金刚石的形成过程进行了研究，建立了以巴基管为涂层在硅片上沉积金刚石薄膜的成核率以及生长速率随时间的变化曲线。由此得出金刚石晶粒的成核经历孕育期、快速增长期和饱和期这三个连续的阶段，随后膜层继续生长增厚的速度逐渐趋于恒定更多还原

【Abstract】 Diamond forming process using hot filament CVD method is investigated.The function relationship between rate of diamond nucleation and later growth on silicon wafer with buckytube coating and deposition time under certain engineering conditions has been established.The experiment result show that nucleation process is comprised of three consecutive stages (inoculation,fast growth and saturation).Later film growth rate is approximately a constant value.更多还原