【摘要】 利用离子束增强沉积技术，在将Ｔｉ用Ａｒ＋束溅射沉积到淬火态９Ｃｒ１８Ｍｏ不锈轴承钢表面的同时，分别用Ａｒ＋，Ｎ＋和Ｃ＋轰击试样表面，制取了增强沉积的表面改性层．利用多功能电子能谱仪测定了沉积层中所含组分的深度分布，用掠角Ｘ射线衍射仪分析了沉积层中形成的新相，并对沉积层的显微硬度、摩擦因数和磨损量（偶件是淬火态ＧＣｒ１５钢球）进行了表征．结果表明，在给定的试验条件下，用Ｔｉ＋Ａｒ，Ｔｉ＋Ｎ或Ｔｉ＋Ｃ离子束增强沉积，都能够明显提高淬火态９Ｃｒ１８Ｍｏ钢表面的显微硬度，显著改善其摩擦学性能．通过结构和成分分析指出：沉积层中形成的ＣｒＮ和／或Ｆｅ２Ｔｉ等强化相是提高硬度、降低摩擦因数和磨损量的主要原因；沉积层中Ｔｉ与Ｏ共存可使其具有良好的润滑性，而且表面存在的Ｃ污染膜也能起一定的润滑作用．更多还原

【Abstract】 In order to improve the tribological properties of 9Cr18Mo stainless bearing steel,the titanium was sputtering deposited onto quenched 9Cr18Mo specimens by argon ions and the deposited layers were simultaneously bombarded by argon,nitrogen or carbon ions respectively.The elemental depth profiles in the deposited layers were measured by Auger electron spectroscopy;The new phases formed in the deposited layers were analyzed by using glancing angle X ray diffraction;The tribological properties of the surfaces including the microhardness,the friction factor and the wear were characterized.It showed that,due to the ion beam enhanced depositions,the surface microhardness of the specimens was increased .The friction factor and the wear of the specimens against the hardened GCr15 steel balls were also improved.Combining the structural and the elemental characterization results, the hard phases formed in the deposited layers,like Fe 2Ti or CrN,are responsible for the observed tribological improvements.The co existence of oxygen and titanium in the deposited layers and the carbon contamination on the surfaces also have certain minor contributions to this improvements.The above results suggest that the ion beam enhanced deposition is an effective way in improving the tribological properties of the 9Cr18Mo stainless bearing steel.更多还原