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铜在SiH4/H2混合气氛中获得的渗硅层的抗氧化性能

Anti oxidation Property of Siliconized Layer for Copper Formed in SiH 4/H 2 Atmosphere

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【作者】 沈复初毛志远郦剑叶必光

【Author】 Shen Fuchu,Mao Zhiyuan,Li Jian,Ye Biguang

【机构】 浙江大学材料系

【摘要】 研究了用硅烷-氢(SiH4/H2)混合气体在铜表面获得的渗硅层的抗氧化性,结果表明,纯铜表面渗硅层的形成提高了材料的抗高温氧化性能。本文对渗硅层的氧化机理进行了探讨。

【Abstract】 The anti oxdation property of siliconized layer formed by using the reaction of SiH 4/H 2 mixture with copper was studied The results show that the formation of Si diffusion layer enhances coppers anti oxidation property In addition,the oxidation thermodynamics and oxidation kinetics of the Si diffusion layer were analysed.After high temperature oxidation(600℃),the compact and homogeneous SiO 2 layer on siliconized copper forms,which is effective to reduce the diffusion of oxygen atoms into the matrix(copper)because of the low diffusion coefficient of oxygen in silica. But the oxide layer formed at ambient temperature is combined by silica and oxide of copper,and then the oxygen can diffuse more easily through this layer Hence,there is no appreciable difference of the anti oxdation property between copper and the siliconized copper at ambient temperature

【关键词】 气体渗硅抗氧化性
【Key words】 vapor siliconizinganti oxidation property
【基金】 国家自然科学基金
  • 【文献出处】 金属热处理 ,HEAT TREATMENT OF METALS , 编辑部邮箱 ,1997年07期
  • 【分类号】TG156.83
  • 【被引频次】5
  • 【下载频次】64
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