【摘要】 对多弧离子踱ＴｉＣＮ和ＴｉＡｌＮ薄膜的磨损机理进行了比较，发现ＴｉＡｌＮ以剥落为其主要磨损形式，而ＴｉＣＮ则有一中间层产生于摩擦面，该中间层由Ｔｉ、Ｃ、Ｏ、Ｆｅ等元素构成。更多还原

【Abstract】 The wear mechanism of TiAlN,TiCN Coatings are investigated It is found that TiAiN Coatings are micro spalled off and slightly plowed in the course of wearing,while TiCN Coatings are Corrupted by a interfacial layer which is developed in the course of wearing with the ingredients of both coat and wear couple更多还原