【摘要】 微电子机械系统与虚拟现实技术都是最新的技术生长点；将此两项技术结合，建立起微机械的虚拟现实系统，无论是对虚拟现实技术的应用，还是对微电子机械系统的发展都具有巨大的意义．本文将ＶＲ技术引入ＭＥＭＳ，给出了微机械的虚拟现实系统体系结构；并在此体系结构基础上提出了微机械操作的多种控制方式更多还原

【Abstract】 Micro Electro Mechanical Systems (MEMS) and Virtual Reality (VR) are both emerging technologies, and it is very important to couple them with each other and set up a virtual reality system for MEMS. In this paper, the architecture of VR system for MEMS is proposed and the control modes of Micro mechanical manipulation under this architecture is described.更多还原