【摘要】 采用Kaufman离子源刻蚀微透镜列阵并采用实时检测系统对刻蚀深度进行了控制。提出了测量微透镜列阵衍射效率的一种方法。对测量误差进行了讨论。更多还原

【Abstract】 A binary optics microlens array (BM) was fabricated by using ion beam etching. The real-time test of etching depth in vacuum enviroment was performed. A noval method of measuring the BM diffraction efficiency was presented.更多还原