【摘要】 报道了本征超导辐射探测器的实验过程及结果分析．探测器是利用超导的临界电流与温度的关系（Ｉｃ－Ｔ）来工作的，而且完全工作在超导本征态．高温超导薄膜为采用准分子激光消融法制备的ＹＢＣＯ外延超导薄膜．采用离子束干法刻蚀进行器件的图形制备．在８～１４μｍ红外波段进行了探测器的光响应测试．调制频率为１０Ｈｚ时，探测器的等效噪声功率（ＮＥＰ）为１．８×１０－１２Ｗ·Ｈｚ－１／２；归一化探测度为２．５×１０９ｃｍ·Ｈｚ１／２·Ｗ－１．实验表明，在低于Ｔｃ的温度范围内，探测器具有平坦的光响应与温度的曲线，从而克服了传统的Ｂｏｌｏｍｅｔｅｒ探测器工作温度过窄的缺点．更多还原

【Abstract】 Experimental results and analyses of intrinsic superconducting radiation detectors are reported. The operation of the detector is based on the relationship between the critical current and the temperature and operated in the intrinsic superconducting state. HT superconducting YBCO epitaxial films were deposited by excimer laser scanning ablation and patterned by dry etching with the ion beam. The photoresponse of the detector has been investigated in the IR spectral range of 8￣14μm. At the chopping frequency of 10Hz, the normalized detectivity was found to be 2.5×10 9 cm·Hz 1/2 ·W -1 , and the noise equivalent power ( NEP ), 1.8×10 -12 W·Hz -1/2 . Experimental results show that the responsivity temperature curve of the intrinsic superconducting detector is flat when the temperature is lower than T c, so the shortcoming of a narrow range of operation temperature of the conventional superconducting Bolometer is overcome.更多还原