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自组织生长InAs/GaAs量子点的退火效应

ANNEALING EFFECTS OF SELF ASSEMBLED InAs/GaAs QUANTUM DOTS

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【作者】 王志明吕振东封松林赵谦李树英吉秀江陈宗圭徐仲英郑厚植

【Author】 WANG Zhi Ming LU Zhen Dong FENG Song Lin ZHAO Qian LI Shu Ying JI Xiu Jiang CHEN Zong Gui XU Zhong Ying ZHENG Hou Zhi (National Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences

【机构】 中国科学院半导体所超晶格国家重点实验室

【摘要】 通过研究GaAs衬底上不同厚度InAs层光致发光的退火效应,发现它和应变量子阱结构退火效应相类似,InAs量子点中的应变使退火引起的互扩散加强,量子点发光峰蓝移.量子点中或其附近一旦形成位错,其中的应变得到释放,互扩散现象就不明显了,退火倾向于产生更多的位错,量子点的发光峰位置不变,但强度减弱.

【Abstract】 The annealing effects of InAs layers with different thicknesses in a GaAs matrix were investigated. The diffusion enhancement by strain, which is well estabished in strained quantum wells, occurs in InAs/GaAs quantum dots(QDs). A shift of the QD luminescence peak towards higher energies results from this enhanced diffusion. When a significant portion of the strain in the structures is relaxed by misfit dislocations, the diffusion becomes negligible, and annealing tends to generate additional dislocations. By these why the QD peak energy is weakly affected and the luminescence intensity decreases could be explained.

【关键词】 量子点退火应变扩散位错
【Key words】 quantum dotsannealingstraindiffusiondislocation.
【基金】 国家自然科学基金,中国科学院重点资助
  • 【文献出处】 红外与毫米波学报 ,JOURNAL OF INFRARED AND MILLIMETER WAVES , 编辑部邮箱 ,1997年06期
  • 【分类号】TN213
  • 【被引频次】1
  • 【下载频次】63
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