【摘要】 提出了一个用相干分辨的外差干涉仪进行光学系统表面检测的方法。利用相干长度短的光源和位置探测器。该方法具有表面选择性、高分辨率和测量时间短等特点更多还原

【Abstract】 A coherent resolved heterodyne interferometer was used to check surfaces of optical objects Owing to a short coherencel ength light source and a position sensitive detection device,the measurements showed high resolution and short measuring time更多还原