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制备气敏膜的新方法及膜的光学特性
NEW PROCESS TO PREPARE GAS_SENSITIVE FILMS AND THEIR OPTICAL PROPERTIES
【摘要】 根据气敏光学特性的要求,用可控气压喷涂和高温处理的新方法,制成SnO2膜。膜面平整均匀,晶粒结构细密,缺陷较少,其光学特性比其它方法制成的薄膜好,使用的设备及工艺简单。
【Abstract】 By a novel process of high_temperature treatment and controlled pressurized spray coating,SnO 2 films are prepared which possess the gas_sensitive optical properties,have smooth surfaces,fine grain textures and fewer defects,are superior to other films prepared by other processes,and can be prepared by relatively simple equipment and technology.
【关键词】 气敏;
喷涂;
热处理;
薄膜;
光学特性;
【Key words】 gas sensitivity; spray; heat treatment; film; optical property;
【Key words】 gas sensitivity; spray; heat treatment; film; optical property;
【基金】 国家自然科学基金,广东省自然科学基金
- 【文献出处】 华南理工大学学报(自然科学版) ,JOURNAL OF SOUTH CHINA UNIVERSITY OF TECHNOLOGY(NATURAL SCIENCE) , 编辑部邮箱 ,1997年07期
- 【分类号】TN361
- 【被引频次】4
- 【下载频次】55