【摘要】 描述了基于外差干涉仪原理的用于精密空间光学的准直方法，分析了该方法进行光学系统准直的系统误差；结果表明，只要较好地控制倾斜误差和照明光源的质量，系统误差就可以消除。实验结果说明，系统的测量误差接近探测元件的分辨率。更多还原

【Abstract】 A method of collimating optical systems by a heterodyne interferometer is described and the errors of the system measurements are analyzed. It is shown that the errors can be eliminated as long as well controlling the tilt or the light quality. The experiments prove that the measuremental error is close to the resolution of the detector.更多还原