【摘要】 本文采用Ｐｄ（ＮＯ３）２－ＴｒｉｔｏｎＸ－１００作硒的改进剂，使Ｓｅ的允许灰化温度提高到１２００℃，吸光度提高到２．９２倍。用塞曼效应校正背景，有效地克服，Ｐ和Ｆｅ等的光谱干扰。此法检测限为８．０ｎｇ／ｍＬ，线性范围为１０—１２０ｎｇ／ｍＬ，线性相关系数为ｒ＝０．９９３１。更多还原

【Abstract】 The three dimensional distribution of arsenic impurity concentration on the silicon wafer surface is determinaed by means of synchrotron radiation X ray microfluorescence (SRXRF) and total reflection X ray fluorescence (TXRF) anslysis.The result of depth profile of As is checked with secondary ion mass spectrometry(SIMS)and the agreement is reasonably good.更多还原