【摘要】 压电超声微电机是依靠定子振动来换能的功率器件，定子性能将直接关系到微电机能否实现。本文采用了ＲａｙｌｅｉｇｈＲｉｔｚ方法来分析微机械中经常采用的多层膜结构（混合结构）定子的固有振动特性。推导中考虑了平面内应力和弯曲应力对固有频率的影响。模拟计算和实验结果符合得较好。此外还讨论了定子有关参数对固有频率的影响。更多还原

【Abstract】 Piezoelectric micromotors are a kind of transducers depending on vibration of stator The properties of the stator determine the realization of micromotor directly In this paper, we theoretically calculate the intrinsic frequency of the hybrid structure stator for the first time The in plane stress and flexural stress are considered reasonably The calculated data are in excellent agreement with the experimental results In addition, the influence of some parameters on intrinsic frequency is also discussed更多还原