【摘要】 通过对亚纳米级超精细表面微观形貌光电测量技术发展现状的介绍，着重阐述了激光差动干涉到同轴式激光表面微观测量的原理，对四种典型同轴式激光轮廓仪的特点以及影响表面微观形貌测量精度和限制测量分辨率的因素进行了分析，介绍了作者关于同轴式激光轮廓仪运用到超精加工金刚石车床上进行纳米级微观形貌在线检测的研究成果。更多还原

【Abstract】 The development situation of the optical-electronic measurment of the surface microprofile wilh subnanometer resolution is described, Emphatically point out the measuring principle of coaxial interference profilometer as well as the features of four typical coaxial profilometers, the influence affects of their resolution and accuracy are analyzed.Introduced our research achievement of the on-machine measuring instrument, which is used on the diamond lathe to measure the microprofile of machining surface with subnanometer resolution.更多还原