【摘要】 本文应用微电于制板和离子刻蚀技术,研制成功凹槽光栅结构接近可见光波长的一组矩形光柵。进行了衍射特性与刻槽周期、深度关系的实验,得到了与矢量藕合波理论计算一致的结果。更多还原

【Abstract】 In this paper, some rectangular gratings with the groove width approximate to the wavelength of visible light were fabricated by means of electron lithography and ion etching techniques. With these gratings, their diffractive performances as functions of period and depth were experimentally measured. The experimental results are in good coincidence with computer simulations by using the theory of vector’s coupled-wave.更多还原