节点文献

多弧离子镀膜机(буиат-6)性能分析和工艺参数研究

INVESTIGATION OF буиат-6 MULTI-ARC PLASMA FILM PLATING MACHINE AND ITS TECHNICAL CHARATERISTICS

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 谢光荣胡社军黎炳雄王桂棠黄小平

【Author】 Xie Guangrong Hu Shejun Li Bingxiong Wang Guitaug Huang Xiaoping (Dept. of Materials Science and Engineering,Guangdong Univ. of Tech., Guangzhou,510643)

【机构】 广东工业大学材料科学与工程系

【摘要】 分析研究了多弧离子镀膜机буиат—6的主要性能。在不同工艺参数条件下,于高速钢基体上制备了Ti膜和TiN膜,用扫描电镜观察Ti膜表面形貌;用能谱仪对Ti膜上小液滴颗粒成份进行测试分析;用超微负荷硬度计测量了TiN膜的显微硬度;用表面刻划仪测试了TiN膜与基体的附着力。实验结果表明:选择适当的工艺条件,包括弧流大小,电磁场强度,镀膜时间以及冷阴极离子源辅助沉积,可获得性能优良的TiN膜,其显微硬度可达Hv2500,附着力为65N。

【Abstract】 Titanium and titanium nitride film were deposited on high speed steel with буиат-6 multi-arc plasma film plating machine under different parameters to investigation the main characteristics of the machine. The titanium film was analysised with Scanning electronic microscope and energy spectrometer.The microhardness of titanium nitride film was measured with microhardness tester,and the adhesion between the film and substrate was measured with surface scratch tester.The experiment results showed that excellent titanium nitride film with microhardness of Hv2500 and adhesion of 65N could be oblained in proper technical parameters inducding arc-point intening,electromagnetic field intensity,ptating temperature and time,ion beam enhanced deposition.

  • 【分类号】TG113
  • 【被引频次】12
  • 【下载频次】165
节点文献中: 

本文链接的文献网络图示:

本文的引文网络