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放电激励XeF(B→X)准分子激光器的高效率运转
HIGH-EFFICIENCY OPERATION OF A DISCHARGE-EXCITED XeF(B→X) EXCIMER LASER
【摘要】 在一台X射线预电离的XeF(B→X)准分子激光器中,我们应用磁开关隔离的预脉冲-主脉冲放电激励电路和磁脉冲压缩技术,研究了激光输出能量和转换效率对气体组份、总气压、电路参数和延迟时间的依赖关系,激光性能获得较大改进。当放电体积为0.11L,气体混合物(NF3/Xe/Ne)的总气压为2.5×105 Pa时,激光输出能量345 mJ,总效率达3%。
【Abstract】 In an X-ray preionized XeF(B→X) discharge-excited laser driven by a prepulse-main pulse circuit with magnetic isolation and a pulse compressor, the dependences of the laser output and conversion efficiency on gas composition, total gas pressure, circuit parameters and delay time were experimentally investigated. A considerable improvement in the laser performance was achieved. An output energy of 345 mJ with an overall efficiency of 3% was obtained from an active volume of 0.11L at a total gas pressure of 2.5×l05Pa in a NF3/Xe/Ne mixture.
【Key words】 Excimer laser; Prepulse-main pulse excitation circuit; Conversion efficiency;
- 【文献出处】 电子科学学刊 , 编辑部邮箱 ,1997年03期
- 【分类号】TN248
- 【下载频次】32