【摘要】 本文简单介绍了非线性晶体相位匹配和铌酸锂光波导准相位匹配倍频原理，开展了扫描电子显微镜电子束辐照反转极化实验，分析了实验结果，摸索出合适的工艺条件，证明利用扫描电镜可以加工出满足准相位匹配条件的电畴反转光栅更多还原

【Abstract】 The principle of non linear crystal phase matching and LiNbO 3 optical waveguide quasiphase matching are chiefly introduced and the inversion poling experiments with the electron beam irradiation in SEM were carried out. Then the results of the experiments were dealt with and the suitable fabricated conditions were obtained. The techniques forming domain inverted grating that meets the needs of quasiphase matching are demonstrated.更多还原