节点文献
用发射光谱方法研究微波ECR等离子体电离特性
Study of ionization properties of microwave ECR plasma by emission spectroscopy
【摘要】 记录并标识了氩气微波电子回旋共振(ECR)等离子体在可见光区的发射光谱谱线;测定了氩原子谱线和离子谱线强度随微波功率和氩气气压的变化关系.指出随着微波功率的增加,原子谱线和离子谱线强度均增加并且呈现饱和趋势
【Abstract】 The emission spectral lines of Ar microwave ECR plasma in visible range were recoded and recognized. The intensities of Ar and Ar + emission spectral lines vary with microwave power and gas pressure, and they increase and tend to be saturated while microwave power increases.
【关键词】 发射光谱分析;
电子回旋共振;
等离子体;
电离;
【Key words】 emission spectrographic analysis; electron cyclotron resonance; plasma; ionization;
【Key words】 emission spectrographic analysis; electron cyclotron resonance; plasma; ionization;
【基金】 国家自然科学基金
- 【文献出处】 大连理工大学学报 ,JOURNAL OF DALIAN UNIVERSITY OF TECHNOLOGY , 编辑部邮箱 ,1997年02期
- 【分类号】O536
- 【被引频次】2
- 【下载频次】78