【摘要】 本文介绍了铂薄膜平面热线型氨传感器.它是利用高频溅射在硅片上制作铂膜电阻,然后涂以气敏涂料,600℃下烧结90分钟而制成的NH₃敏元件.同时讨论了几种元素对元件灵敏度及选择性的影响,发现以SnO₂为基体材料加入少量的Au对氨气有较高的灵敏度,以WO₃为主体材料加少量钒酸盐的保护层,对元件的选择性有所改善.更多还原

【Abstract】 Planar hot wire type on Pt thin film was investigated. RF sputtering was employed for the Pt film deposition onto Si plate. After the Pt film was covered with gas sensing material, it was sintered at 600# for 90 minutes. The effects of several elements to sensitivity and selectivity of the sensor was also examined. It was found that the Au addition to SnO2 base material resulted in a increase of sensitivity to ammonia, and the protection layer based on addition of vanadate to WO3 improved selectivity.更多还原